Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates

Advanced Materials

Volumn 9, Issue 11, 1997, Pages 891-895

  Jeon, Noo Li ^a   Clem, Paul ^a   Jung, Duk Young ^a   Lin, Wenbin ^a   Girolami, Gregory S ^a   Payne, David A ^a   Nuzzo, Ralph G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; FERROELECTRIC DEVICES; FILM GROWTH; INFRARED DEVICES; MONOLAYERS; NUCLEATION; SEMICONDUCTOR DEVICE STRUCTURES; THIN FILMS;

FERROELECTRIC CAPACITORS; MICROMACHINES; MOLECULAR TEMPLATES; SELF ASSEMBLED MONOLAYERS;

CAPACITORS;

EID: 0031551391     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19970091107     Document Type: Article

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