Rapid soft lithography by bottom-up enhanced capillarity

Langmuir

Volumn 20, Issue 12, 2004, Pages 4802-4804

  Pisignano, Dario ^a   Di Benedetto, Francesca ^a   Persano, Luana ^a   Gigli, Giuseppe ^a   Cingolani, Roberto ^a  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARITY; HYDROPHILICITY; MASKS; NANOTECHNOLOGY; REACTIVE ION ETCHING; THERMODYNAMIC STABILITY; VISCOSITY;

MICROFLUIDICS; NANOELECTRONICS; PATTERN TRANSFER; SOFT MOLDING;

LITHOGRAPHY;

CAPILLARITY; ETCHING; LITHOGRAPHY; THERMAL STABILITY; VISCOSITY; WETTABILITY;

EID: 2942726603     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la049943q     Document Type: Article

References (24)

1. Xia, Y.; Whitesides, G. M. Angew. Chem., Int. Ed. Engl. 1998, 37, 550-576.
2. Chou, S. Y.; Krauss, P. E.; Renstrom, P. J. Science 1996, 272, 85-87.
3. Suh, K. Y.; Kim, Y. S.; Lee, H. H. Adv. Mater. 2001, 13, 1386-1389.
4. Kumar, A.; Whitesides, G. M. Appl. Phys. Lett. 1993, 63, 2002-2004.
5. Kim, E.; Xia, Y.; Whitesides, G. M. Nature 1995, 376, 581-584.
6. Jeon, N. L.; Hu, J.; Whitesides, G. M.; Erhardt, M. K.; Nuzzo, R. G. Adv. Mater. 1998, 17, 1466-1469.
7. Beh, W. S.; Kim, I. T.; Qin, D.; Xia, Y.; Whitesides, G. M. Adv. Mater. 1999, 11, 1038-1041.
8. Zhao, X.-M.; Stoddart, A.; Smith, S. P.; Kim, E.; Xia, Y.; Prentiss, M.; Whitesides, G. M. Adv. Mater. 1996, 8, 420.
9. Yang, P.; Wirnsberger, G.; Huang, H. C.; Corsero, S. R.; McGehee, M. D.; Scott, B.; Deng, T.; Whitesides, G. M.; Chmelka, B. F.; Buratto, S. K.; Stucky, G. D. Science 2000, 287, 465-467.
10. Chen, J.; Weimer, W. A. J. Am. Chem. Soc. 2002, 124, 758-759.
11. Delamarche, E.; Bernard, A.; Schmid, H.; Michel, B.; Biebuyck, H. Science 1997, 276, 779-781.
12. Delamarche, E.; Bernard, A.; Schmid, H.; Bietsch, A.; Michel, B.; Biebuyck, H. J. Am. Chem. Soc. 1998, 120, 500-508.
13. Papra, A.; Bernard, A.; Juncker, D.; Larsen, N. B.; Michel, B.; Delamarche, E. Langmuir 2001, 17, 4090-4095.
14. Xiao, D.; Zhang, H.; Wirth M. Langmuir 2002, 18, 9971-9976.
15. Myers, D. Surfaces, Interfaces and Colloids; Wiley-VCH Publishers: New York, 1999.
16. Xia, Y.; Tien, J.; Qin, D.; Whitesides, G. M. Langmuir 1996, 12, 4033-4038.
17. Ferguson, G. S.; Chaudhury, M. K.; Biebuyck, H. A.; Whitesides, G. M. Macromolecules 1993, 26, 5870-5875.
18. Ferguson, G. S.; Chaudhury, M. K.; Sigal, G. B.; Whitesides, G. M. Science 1991, 253, 776-778.
19. Chaudhury, M. K.; Whitesides, G. M. Science 1992, 256, 1230-1232.
20. Genzer, J.; Efimenko, K. Science 2000, 290, 2130-2133.
21. Böhme, P.; Vedantham, G.; Przybycien, T.; Belfort, G. Langmuir 1999, 15, 5323-5328.
22. Ngai, K. L.; Plazek, D. J. Physical Properties of Polymers Handbook; Mark,. J. E., Ed.; American Institute of Physics Press: Woodbury, NY, 1996; pp 341-362.
23. Bohmer, R.; Angell, C. A. Phys. Rev. B 1992, 45, 10091-10094.
24. Pisignano, D.; Sariconi, E.; Mazzeo, M.; Gigli, G.; Cingolani, R. Adv. Mater. 2002, 21, 1565-1567.