Fine patterning and characterization of gel films derived from methyltriethoxysilane and tetraethoxysilane

Journal of the American Ceramic Society

Volumn 81, Issue 11, 1998, Pages 2849-2852

  Matsuda, Atsunori ^a   Matsuno, Yoshihiro ^b   Tatsumisago, Masahiro ^a,c   Minami, Tsutomu ^a,c  

^a Osaka Prefecture University   (Japan)

^b NIPPON SHEET GLASS CO LTD   (Japan)

^c AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; GLASS; HEAT TREATMENT; OPTICAL DATA STORAGE; PRESSING (FORMING); SHRINKAGE; SILANES; SUBSTRATES;

METHYLTRIETHOXYSILANE; TETRAETHOXYSILANE;

GELS;

EID: 0032207645     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1998.tb02705.x     Document Type: Article

References (16)

1. 3," J. Jpn. Ceram. Soc., 97 [1] 91-94 (1989).
2. P. Innocenzi, M. O. Abdirashid, and M. Guglielmi, "Structure and Properties of Sol-Gel Coatings from Methyltriethoxysilane and Tetraethoxysilane," J. Sol-Gel Sci. Technol., 3 [1/2/3] 47-55 (1994).
3. 2 Thin Films Prepared by the Sol-Gel Method on Nylon-6 Substrates," J. Sol-Gel Sci. Technol., 6 [1] 107-11 (1996).
4. K. Hara, T. Inazumi, and T. Izumitani, "Application of Sol-Gel-Derived Silica Films Containing a Methyl Radical to a Slab Laser," J. Non-Cryst. Solids, 100, 490-93 (1988).
5. T. Nakano, K. Tokunaga, and T. Ohta, "Effects of Si-C Bond Content on Film Properties of Organic Spin-On Glass," J. Electrochem. Soc., 142 [4] 1303-308 (1995).
6. P. Innocenzi and H. Kozuka, "Methyltriethoxysilane-Derived Sol-Gel Coatings Doped with Silver-Metal Particles," J. Sol-Gel Sci. Technol., 3 [1/2/3] 229-33 (1994).
7. A. Sarkar, Y. Yan, P. D. Fuqua, and W. Jahn, "Processing and Properties of Methyl-Modified Silicate Materials for Optical Application"; pp. 228-33 in Glass Surface Sol-Gel Glasses, Vol. 4, Proceedings of XVII International Congress on Glass (Beijing, China, Oct. 1995). Chinese Ceramic Society, Beijing, China, 1995.
8. H. Yamashita, T. Taniguchi, K. Tanaka, and N. Maekawa, "Structure of Spherical Porous Silica Particles Derived from Tetramethoxysilane and Methyltrimethoxysilane," J. Jpn. Ceram. Soc., 105 [4] 335-40 (1997).
9. 3/2 Gel Film on Aqueous Solutions. Infrared Spectroscopic Study of the Reaction in the Gel Film," J. Phys. Chem. B, 101 [8] 1328-31 (1997).
10. A. Matsuda, K. Morio, T. Kishimoto, N. Tohge, and T. Minami, "Fine-Patterning on Glass Substrates Using Gel Films Derived from Methyltriethoxysilane"; see Ref. 7, pp. 349-54.
11. A. Matsuda, Y. Matsuno, S. Katayama, T. Tsuno, N. Tohge, and T. Minami, "Physical and Chemical Properties of Titania-Silica Films Derived from Poly(ethylene glycol)-Containing Gels," J. Am. Ceram. Soc., 73 [8] 2217-21 (1990).
12. H. Krug, N. Merl, and H. Schmidt, "Fine Patterning of Thin Sol-Gel Films," J. Non-Cryst. Solids, 147/148, 447-53 (1992).
13. N. Tohge, K. Shinmou, and T. Minami, "Effects of UV-Irradiation on the Formation of Oxide Thin Films from Chemically Modified Metal Alkoxides," J. Sol. Gel Sci. Technol., 2, 581-85 (1994).
14. T. Kishimoto, H. Nemoto, K. Hamanaka, H. Imai, S. Taniguchi, M. Oikawa, E. Okuda, and K. Nishizawa, "Application of Planar Microlens Arrays to Liquid Crystal Devices"; pp. 103-108 in Glass Structure, Optical and Optoelectronic Devices, Vol. 3, Proceedings of XVI International Congress on Glass (Madrid, Spain, Oct. 1992). Spanish Ceramic Society, Madrid, Spain, 1992.
15. 3 by the Sol-Gel Method," J. Non-Cryst. Solids, 121, 182-87 (1990).
16. H. Yoshino, K. Kamiya, and H. Nasu, "IR Study on the Structural Evolution of Sol-Gel-Derived SiO, Gels in the Early Stage of Conversion to Glasses," J. Non-Cryst. Solids, 126 [1/2] 68-78 (1990).