Fabrication of SiC-based ceramic microstructures from preceramic polymers with sacrificial templates and lithographic techniques-A review

Journal of the Ceramic Society of Japan

Volumn 114, Issue 1330, 2006, Pages 473-479

  Yoon, Tae Ho ^a   Lee, Hong Joo ^a   Yan, Jia ^a   Kim, Dong Pyo ^a  

^a Chungnam National University   (South Korea)

Author keywords

Microfabrication; Microfluidics; Preceramic polymer; Soft lithography

Indexed keywords

HIGH TEMPERATURE APPLICATIONS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROPOROUS MATERIALS; MICROSTRUCTURE; NANOTUBES; PYROLYSIS; SILICON CARBIDE;

MICROFABRICATION; MICROFLUIDICS; PRECERAMIC POLYMER; PRECERAMIC POLYMERS; SACRIFICIAL TEMPLATES; SOFT LITHOGRAPHY;

CERAMIC MATERIALS;

EID: 33744796245     PISSN: 09145400     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj.114.473     Document Type: Review

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