"controlling" internal microstructure of nanopatterned oxides via soft electron beam lithography (soft-eBL)

Journal of Materials Chemistry

Volumn 19, Issue 25, 2009, Pages 4295-4299

  Dravid, Vinayak P ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM UP METHODS; CERAMIC OXIDES; EXTERNAL SHAPE; INTERNAL MICROSTRUCTURE; LIQUID PRECURSORS; NANO PATTERN; NANO-SCALE POROSITY; NANOSCALE PATTERNING; SINGLE CRYSTAL EPITAXY; THERMAL TREATMENT; TOP-DOWN APPROACH;

CERAMIC MATERIALS; CRYSTAL GROWTH; ELECTRON BEAMS; EPITAXIAL GROWTH; HEAT TREATMENT; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OXIDES;

ELECTRON BEAM LITHOGRAPHY;

EID: 67649132912     PISSN: 09599428     EISSN: 13645501     Source Type: Journal    
DOI: 10.1039/b903201k     Document Type: Article

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