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Volumn 17, Issue 7, 2007, Pages 1131-1136

Soft lithography of ceramic patterns

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON BEAM LITHOGRAPHY; ELECTRON IRRADIATION; NITRATES; OXIDE FILMS; PATTERNMAKING; POLYCRYSTALLINE MATERIALS;

EID: 34248523305     PISSN: 1616301X     EISSN: 16163028     Source Type: Journal    
DOI: 10.1002/adfm.200600783     Document Type: Article
Times cited : (48)

References (21)
  • 15


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.