3D Photonic structures by sol-gel imprint lithography

Materials Research Society Symposium Proceedings

Volumn 1002, Issue , 2007, Pages 7-12

  Verschuuren, Marc ^a   Sprang, Hans Van ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMATERIALS; SILICA; SOL-GELS;

CROSSED GRATINGS; IMPRINT LITHOGRAPHY; IMPRINTING PROCESS; MULTILAYER STACKS; PATTERN DISTORTION; PHOTONIC STRUCTURE; REPLICATION PROCESS; THREE-DIMENSIONAL STRUCTURE;

PHOTONICS;

EID: 70349925732     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-1002-n03-05     Document Type: Conference Paper

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