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Volumn 18, Issue 17, 2008, Pages 2563-2571
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Limits to nanopatterning of fluids on surfaces in soft lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
ANGLE MEASUREMENT;
ATOMIC FORCE MICROSCOPY;
CONTACT ANGLE;
ELECTRON DEVICE MANUFACTURE;
ELECTRONIC EQUIPMENT MANUFACTURE;
LITHOGRAPHY;
MICROCHANNELS;
MICROSCOPIC EXAMINATION;
NANOIMPRINT LITHOGRAPHY;
OPTICAL MICROSCOPY;
PHOTORESISTS;
SCANNING PROBE MICROSCOPY;
THICKNESS MEASUREMENT;
IMAGING ELLIPSOMETRY;
LOW VISCOSITY;
MICROCONTACT PRINTING];
NANO-PATTERNING;
OPTICAL DIFFRACTIONS;
PDMS STAMPS;
POLYDIMETHYLSILOXANE PDMS;
SOFT-LITHOGRAPHY;
SUB MICROMETERS;
TIME-RESOLVED;
WATER CONTACT ANGLE MEASUREMENT;
IMAGING TECHNIQUES;
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EID: 52449097206
PISSN: 1616301X
EISSN: 16163028
Source Type: Journal
DOI: 10.1002/adfm.200800073 Document Type: Article |
Times cited : (21)
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References (21)
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