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Volumn 18, Issue 17, 2008, Pages 2563-2571

Limits to nanopatterning of fluids on surfaces in soft lithography

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; ELECTRON DEVICE MANUFACTURE; ELECTRONIC EQUIPMENT MANUFACTURE; LITHOGRAPHY; MICROCHANNELS; MICROSCOPIC EXAMINATION; NANOIMPRINT LITHOGRAPHY; OPTICAL MICROSCOPY; PHOTORESISTS; SCANNING PROBE MICROSCOPY; THICKNESS MEASUREMENT;

EID: 52449097206     PISSN: 1616301X     EISSN: 16163028     Source Type: Journal    
DOI: 10.1002/adfm.200800073     Document Type: Article
Times cited : (21)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.