Low temperature deposition of patterned TiO2 thin films using photopatterned self-assembled monolayers

Applied Physics Letters

Volumn 69, Issue 6, 1996, Pages 860-862

  Collins, Rochael J ^a   Shin, Hyunjung ^a   DeGuire, Mark R ^a   Heuer, Arthur H ^a   Sukenik, Chaim N ^b  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b BAR ILAN UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000259242     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117916     Document Type: Article

References (15)

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13. 4 (distilled) and 6 M HCl and filtered with a sintered-glass funnel. The solution was stable at room temperature for 1 week. 40-50 mL aliquots were removed from the solution for use in depositions.
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