Thermowetting embossing nanoimprinting of the organic-inorganic hybrid materials

Thin Solid Films

Volumn 476, Issue 1, 2005, Pages 181-184

  Kim, Woo Soo ^a   Kim, Kwang Soo ^a   Kim, Young Cheol ^b   Bae, Byeong Soo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea University of Technology and Education   (South Korea)

Author keywords

Nano sturctures; Silicon oxide; Wetting

Indexed keywords

LITHOGRAPHY; NANOSTRUCTURED MATERIALS; ORGANIC POLYMERS; PHOTONS; POLYMERIZATION; SILICA; ULTRAVIOLET RADIATION; WETTING;

HYBRID MATERIALS; NANOSCALE PATTERNING; SUBMICRON PATTERNS; THERMOWETTING EMBOSSING NANOIMPRINTING;

NANOTECHNOLOGY;

EID: 13844296949     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.09.026     Document Type: Article

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