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Materials Research Society Symposium - Proceedings

Volumn 687, Issue , 2002, Pages 69-74

Micromachined nanoparticulate ceramic gas sensor array on MEMS substrates

(2) Heule, Martin a Gauckler, Ludwig J a

a ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC MATERIALS; CHEMICAL SENSORS; GRAIN GROWTH; NANOSTRUCTURED MATERIALS; SEMICONDUCTING TIN COMPOUNDS; TEMPERATURE;

ON-CHIP ANNEALING; SENSOR ARRAY; TIN OXIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036353703 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (1)

References (9)

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7
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8
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- (1999) Sensors and Actuators B , vol.58 , pp. 310
- Carotta, M.C.¹ Ferroni, M.² Gnani, D.³ Guidi, V.⁴ Merli, M.⁵ Martinelli, G.⁶ Casale, M.C.⁷ Notaro, M.⁸

9
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- (1998) Tin Dioxide Nanopowders for Gas Sensor Applications
- Vacassy, R.¹ Houriet, R.² Plummer, G.J.G.³ Dutta, J.⁴ Hofmann, H.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.