Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 100-106

  Heule, Martin ^a   Gauckler, L J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Gas sensors; Low energy consumption; Microhotplates; Micromolding in capillaries; Miniaturised gas sensor array; Soft lithography; Tin oxide

Indexed keywords

CAPILLARITY; LITHOGRAPHY; MICROMACHINING; MOLDING; TIN COMPOUNDS;

MICROMOLDING;

CHEMICAL SENSORS;

EID: 0038787913     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00243-0     Document Type: Conference Paper

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