Powder-based in oxide microcomponents on silicon substrates fabricated by micromolding in capillaries

Journal of the American Ceramic Society

Volumn 86, Issue 3, 2003, Pages 407-12

  Heule, Martin ^a   Schell, Julia ^a   Gauckler, Ludwig J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARITY; INORGANIC COATINGS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MOLDING; OXIDES; POROSITY; POWDER METALS; RHEOLOGY; SILICON WAFERS; SUBSTRATES; SUSPENSIONS (FLUIDS);

CAPILLARIES; COLLOIDAL SUSPENSIONS; MICROMOLDING; POLYDIMETHYLSILOXANE; POWDER BASED TIN OXIDE MICROCOMPONENTS;

TIN COMPOUNDS;

EID: 0037354268     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2003.tb03313.x     Document Type: Article

References (17)

1. M. Mehregany, C. A. Zorman, N. Rajan, and C. H. Wu, "Silicon Carbide MEMS for Harsh Environments," Proc. IEEE, 86 [8] 1594-610 (1998).
2. J. F. Li, S. Sugimoto, S. Tanaka, M. Esashi, and R. Watanabe, "Manufacturing Silicon Carbide Microrotors by Reactive Hot Isostatic Pressing within Micromachined Silicon Molds," J. Am. Ceram. Soc., 85 [1] 261-63 (2002).
3. B. A. Vojak, S. J. Park, C. J. Wagner, J. G. Eden, R. Koripella, J. Burdon, F. Zenhausern, and D. L. Wilcox, "Multistage, Monolithic Ceramic Microdischarge Device Having an Active Length of Similar to 0.27 mm," Appl. Phys. Lett., 78 [10] 1340-42 (2001).
4. H. L. Tuller, "Advanced Sensor Technology Based on Tin Oxide Thin Film - MEMS Integration," J. Electroceram., 4 [2] 415-25 (2000).
5. 2 Gas Sensors: A Status Report," Fresenius Z. Anal. Chem., 365, 287-304 (1999).
6. U. Schönholzer, R. Hummel, and L. J. Gauckler, "Microfabrication of Ceramics by Filling of Photoresist Molds," Adv. Mater., 12 [lsqg]17] 1261-63 (2000).
7. Y. Xia and G. M. Whitesides, "Soft Lithography," Angew, Chem., Int. Ed. Engl., 37, 550-75 (1998).
8. H. Yang, P. Deschatelets, S. T. Brittain, and G. M. Whitesides, "Fabrication of High Performance Ceramic Microstructures from a Polymeric Precursor Using Soft Lithography," Adv. Mater., 13 [1] 54 (2001).
9. P. Yang, T. Deng, D. Zhao, P. Feng, D. Pine, B. F. Chmelka, G. M. Whitesides, G. D. Stucky, "Hierarchically Ordered Oxides," Science, 282, 2244 (1998).
10. M. Heule, L. Meier, and L. J. Gauckler, "Micropatterning of Ceramics on Substrates towards Gas Sensing Applications," Mater. Res. Soc. Symp. Proc., 657, EE9.4 (2001).
11. M. Heule and L. J. Gauckler, "Gas Sensors Fabricated from Ceramic Suspensions by Micromolding in Capillaries," Adv. Mater., 13 [23] 1790 (2001).
12. E. Kim, "Imbibition and Flow of Wetting Liquids in Noncircular Capillaries," J. Phys. Chem. B, 101, 855-63 (1997).
13. E. Kim., Y. Xia, and G. M. Whitesides, "Polymer Microstructures Formed by Moulding in Capillaries," Nature (London), 376, 581-84 (1995).
14. M. J. Owen, "Surface Chemistry and Applications"; pp. 309-72 in Siloxane Polymers. Edited by S. J. Clarson and J. A. Semlyen. PTR Prentice-Hall, Englewood Cliffs, NJ, 1993.
15. E. Kim, Y. Xia, and G. M. Whitesides, "Micromolding in Capillaries: Applications in Materials Science," J. Am. Chem. Soc., 118, 5722-31 (1996).
16. M. Heule and L. J. Gauckler, "Microfabrication of Ceramics Based on Colloidal Suspensions and Photoresist Masks," J. Photopolym. Sci. Technol., 14 [3] 449 (2001).
17. H. J. Muhr, F. Krumeich, U. P. Schonholzer, F. Bieri, M. Niederberger, L. J. Gauckler, and R. Nesper, "Vanadium Oxide Nanotubes-A New Flexible Vanadate Nanophase," Adv. Mater., 12 [3] 231 (2000).