Chemical solution deposition of electronic oxide films

Comptes Rendus Chimie

Volumn 7, Issue 5, 2004, Pages 433-461

  Schwartz, Robert W ^a   Schneller, Theodor ^b   Waser, Rainer ^b,c  

^a MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (United States)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Chemical solution deposition; Dielectrics; Electronic oxide films; Epitaxial films; Ferroelectrics; Microstructure; Nanotechnology; Ultra thin films

Indexed keywords

OXIDE;

CHEMICAL STRUCTURE; CRYSTALLIZATION; DECOMPOSITION; ELECTRONICS; FILM; GEL; MATERIALS; PHASE TRANSITION; REVIEW; SOLID; SYNTHESIS; TECHNIQUE; THERMODYNAMICS;

EID: 2942559048     PISSN: 16310748     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.crci.2004.01.007     Document Type: Article

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