Improvements in the structural integrity of green ceramic microcomponents by a modified soft moulding process

Journal of the European Ceramic Society

Volumn 27, Issue 2-3, 2007, Pages 645-650

  Zhang, Dou ^a   Su, Bo ^b   Button, Tim W ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Al2O3; Microfabrication; Microstructure prefiring; Shaping; Strength

Indexed keywords

MICROFABRICATION; MICROPATTERN; PACKING DENSITY; POLYDIMETHYLSILOXANE; SOFT MOULDING METHOD; STRUCTURAL INTEGRITY;

CRYSTAL MICROSTRUCTURE; ELASTOMERS; MICROELECTROMECHANICAL DEVICES; POROSITY; STRENGTH OF MATERIALS;

ALUMINA;

ALUMINA; CRYSTAL MICROSTRUCTURE; ELASTOMERS; MICROELECTROMECHANICAL DEVICES; POROSITY; STRENGTH OF MATERIALS;

EID: 33751010443     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.04.045     Document Type: Article

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