Submicrometer-scale patterning of ceramic thin films

Journal of Electroceramics

Volumn 12, Issue 1-2, 2004, Pages 53-68

  Martin, C R ^a   Aksay, I A ^a  

^a Princeton University   (United States)

Author keywords

Ceramic; Patterning; Thin films

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CERAMIC MATERIALS; DIELECTRIC DEVICES; ELASTOMERS; FERROELECTRIC MATERIALS; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY; PIEZOELECTRICITY; SEMICONDUCTOR DEVICES;

CHEMICAL ETCHING; ELASTOMER MOLDS; PATTERNING; PYROELECTRIC DEVICES;

THIN FILMS;

EID: 3142684522     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JECR.0000034001.15359.98     Document Type: Review

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