Wafer-level in-registry microstamping

Journal of Microelectromechanical Systems

Volumn 8, Issue 1, 1999, Pages 85-89

  Folch, Albert ^a,b   Schmidt, Martin A ^a,c,d  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b SHRINERS HOSPITALS FOR CHILDREN   (United States)

^c Department of Electrical Engineering ^*

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON WAFERS; STAMPING;

MICROSTAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033098870     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.749407     Document Type: Article

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