Patterned microstructure of sol-gel derived complex oxides using soft lithography

Advanced Materials

Volumn 12, Issue 19, 2000, Pages 1421-1424

  Seraji, Seana ^a   Wu, Yun ^a   Jewell Larson, Nels E ^a   Forbess, Michael J ^a   Limmer, Steven J ^a   Chou, Tammy P ^a   Cao, Guozhong ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; CROSSLINKING; GLYCOLS; HIGH TEMPERATURE EFFECTS; LITHOGRAPHY; MICROSTRUCTURE; MOLDING; ORGANIC SOLVENTS; PHASE COMPOSITION; SHRINKAGE; STRONTIUM COMPOUNDS;

ETHYLENE GLYCOLS; MICROCAPILLARY MOLDING; NIOBIUM PENTACHLORIDE; PATTERNED MICROSTRUCTURE; SHAPE DISTORTION; STRONTIUM NITRATE;

OXIDES;

EID: 0034300429     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200010)12:19<1421::AID-ADMA1421>3.0.CO;2-4     Document Type: Article

References (14)

1. Y. Xia, G. M. Whiteside, Annu. Rev. Mater. Sci. 1998, 28, 153.
2. W. S. Beh, I. T. Kim, D. Qin, Y. Xia, G. M. Whitesides, Adv. Mater. 1999, 11, 1038.
3. J. T. Rantala, G. E. Jabbour, J. Vahakanagas, S. Honkanen, B. Kippelen, N. Pcyghambarian, Jpn. J. Appl. Phys., Part 2 (Lett.) 1998, 37, L1098.
4. J. A. Rogers, M. Meier, 56th Annu. Device Res. Conf. Dig. IEEE, New York 1998, p. 134.
5. J. Hu, R. G. Beck, R. M. Westervelt, G. M. Whitesides, Adv. Mater. 1998, 10, 574.
6. N. L. Jeon, J. Hu, G. M. Whitesides, M. K. Erhardt, R. G. Nuzzo, Adv. Mater. 1998, 10, 1466.
7. M. J. Lochhead, P. Yager, Int. Soc. Opt. Eng. 1997, 3136, 261.
8. Y. Xia, G. M. Whiteside, Adv. Mater. 1996, 8, 245.
9. D. L. Polla, L. F. Francis, MRS Bull. 1996, July, 59.
10. A. V. Prasadaro, U. Selvaraj, S. Komarneni, J. Mater. Res. 1995, 10, 704.
11. K. Okuwada, S. Nakamura, H. Nozawa, J. Mater. Res. 1999, 14, 855.
12. G. Yi, M. Sayer, Ceram. Bull. 1991, 70, 1173.
13. C. J. Brinker, G. W. Scherer, Sol-Gel Sciences, Academic, San Diego, CA 1990.
14. J. S. Reed, Principles of Ceramic Processing, Wiley, New York 1994.