CVD and precursor chemistry of transition metal nitrides

Coordination Chemistry Reviews

Volumn 257, Issue 13-14, 2013, Pages 2073-2119

  Kafizas, Andreas ^a   Carmalt, Claire J ^a   Parkin, Ivan P ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

CVD; Precursor chemistry; Thin film; Titanium nitride; Transition metal nitrides

Indexed keywords

EID: 84877145128     PISSN: 00108545     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ccr.2012.12.004     Document Type: Review

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