SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 102, Issue 3, 1998, Pages 256-259

Growth of MoxN films via chemical vapor deposition of MoCl5 and NH3

(3) Roberson, S L a Finello, D b Davis, R F a

a North Carolina State University (United States)

b AIR FORCE RESEARCH LABORATORY (United States)

Author keywords

Chemical vapour deposition; Electrodes; Molybdenum nitride; Tribological coatings

Indexed keywords

CHEMICAL ANALYSIS; CHEMICAL VAPOR DEPOSITION; ELECTROCHEMICAL ELECTRODES; FILM GROWTH; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; STOICHIOMETRY; SURFACE STRUCTURE; TEMPERATURE; TRACE ELEMENTS; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS;

ANHYDROUS AMMONIA; ENERGY DISPERSIVE X RAY; MOLYBDENUM NITRIDE; MOLYBDENUM PENTACHLORIDE; SURFACE MACROSTRUCTURE;

NITRIDES;

COATING; FILM; TRIBOLOGY;

EID: 0032052957 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(98)00448-4 Document Type: Article

Times cited : (25)

References (13)

1
- 3843124019
- H. Abe, A.T. Bell, Catal. Lett. 18 (1993) 1.
- (1993) Catal. Lett. , vol.18 , pp. 1
- Abe, H.¹ Bell, A.T.²

2
- 0001944602
- K.S. Lee, H. Abe, J.A. Reimer, A.T. Bell, J. Catal. 139 (1993) 34.
- (1993) J. Catal. , vol.139 , pp. 34
- Lee, K.S.¹ Abe, H.² Reimer, J.A.³ Bell, A.T.⁴

3
- 0024070594
- J.C. Schlatter, S.T. Oyama, J.E. Metcalf, J.M. Lambert, Ind. Eng. Chem. Res. 27 (1988) 1648.
- (1988) Ind. Eng. Chem. Res. , vol.27 , pp. 1648
- Schlatter, J.C.¹ Oyama, S.T.² Metcalf, J.E.³ Lambert, J.M.⁴

4
- 0030673630
- S.L. Roberson, D. Finello, R.F. Davis, Mater. Res. Soc. Symp. Proc. 451 (1996) 555.
- (1996) Mater. Res. Soc. Symp. Proc. , vol.451 , pp. 555
- Roberson, S.L.¹ Finello, D.² Davis, R.F.³

5
- 0028446378
- V.P. Anitha, S. Vitta, S. Major, Thin Solid Films 245 (1994) 1.
- (1994) Thin Solid Films , vol.245 , pp. 1
- Anitha, V.P.¹ Vitta, S.² Major, S.³

6
- 0030072076
- V.P. Anitha, S. Major, D. Chandrashekharam, M. Bhatnagar, Surf. Coat. Technol. 79 (1996) 50.
- (1996) Surf. Coat. Technol. , vol.79 , pp. 50
- Anitha, V.P.¹ Major, S.² Chandrashekharam, D.³ Bhatnagar, M.⁴

7
- 0026375399
- P.J. Rudnik, M.E. Graham, W.D. Sproul, Surf. Coat. Technol. 49 (1991) 293.
- (1991) Surf. Coat. Technol. , vol.49 , pp. 293
- Rudnik, P.J.¹ Graham, M.E.² Sproul, W.D.³

8
- 0026851408
- M. Maoujoud, L. Binst, P. Delcambe, M. Offergeld-Jardinier, F. Bouillon, Surf. Coat. Technol. 52 (1992) 179.
- (1992) Surf. Coat. Technol. , vol.52 , pp. 179
- Maoujoud, M.¹ Binst, L.² Delcambe, P.³ Offergeld-Jardinier, M.⁴ Bouillon, F.⁵

9
- 0029376089
- J.D. Wu, C.Z. Wu, Z.M. Song, L.H. Wu, F.M. Li, Appl. Surf. Sci. 90 (1995) 81.
- (1995) Appl. Surf. Sci. , vol.90 , pp. 81
- Wu, J.D.¹ Wu, C.Z.² Song, Z.M.³ Wu, L.H.⁴ Li, F.M.⁵

10
- 0026821695
- J.G. Choi, D. Choi, L.T. Thompson, J. Mater. Res. 7 (1992) 374.
- (1992) J. Mater. Res. , vol.7 , pp. 374
- Choi, J.G.¹ Choi, D.² Thompson, L.T.³

11
- 0028486488
- E.P. Donovan, G.K., Hubler, M.S. Mudholkar, L.T. Thompson, Surf. Coat. Technol. 66 (1994) 499.
- (1994) Surf. Coat. Technol. , vol.66 , pp. 499
- Donovan, E.P.¹ Hubler, G.K.² Mudholkar, M.S.³ Thompson, L.T.⁴

12
- 0029237747
- M.R. Close, J.L. Peterson, Mater. Res. Soc. Symp. Proc. 368 (1995) 33.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.368 , pp. 33
- Close, M.R.¹ Peterson, J.L.²

13
- 0017943225
- H. Jehn, P. Ettmayer, J. Less Common Met. 58 (1978) 85.
- (1978) J. Less Common Met. , vol.58 , pp. 85
- Jehn, H.¹ Ettmayer, P.²

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