Tungsten nitride inverse opals by atomic layer deposition

Nano Letters

Volumn 3, Issue 9, 2003, Pages 1293-1297

  Rugge, Alessandro ^a   Becker, Jill S ^b   Gordon, Roy G ^b   Tolbert, Sarah H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TUNGSTEN DERIVATIVE; TUNGSTEN NITRIDE; UNCLASSIFIED DRUG;

ARTICLE; ATOM; COLLOID; CONFORMATION; CRYSTAL STRUCTURE; ELECTRONICS; FILM; FILTRATION; PARTICLE SIZE; TECHNIQUE; THICKNESS;

EID: 0141684494     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl034362r     Document Type: Article

References (37)

1. Yablonovitch, E. J. Opt. Soc. Am. B 1993, 10, 283. Yablonovitch, E.; Gmitter, T. L. Phys Rev. Lett. 1989, 63, 1950.
2. Yablonovitch, E. J. Opt. Soc. Am. B 1993, 10, 283. Yablonovitch, E.; Gmitter, T. L. Phys Rev. Lett. 1989, 63, 1950.
3. Busch, K.; Sajeev, J. Phys. Rev. E 1998, 58, 3896.
4. Ho, K. M.; Chan, C. T.; Soukoulis, C. M. Phys. Rev. Lett. 1990, 65, 3152
5. Biswas, R.; Sigalas, M. M.; Subramania, G.; Ho, K. M. Phys. Rev. B 1998, 57, 3701.
6. Moroz, A.; Sommers, C. J. Phys.: Condens. Matter 1999, 11, 997.
7. Velev, O. D.; Kaler, E. W. Adv. Mater. 2000, 12, 531.
8. Imhof, A.; Pine, D. J. Nature 1997, 389, 948.
9. Holland, B. T.; Blanford, C. F.; Stein, A. Science 1998, 281, 538. Holland, B. T.; Blanford, C. F.; Do, T.; Stein, A. Chem. Mater. 1999, 11, 795. Holland, B. T.; Abrams, L.; Stein, A. J. Am. Chem. Soc. 1999, 121, 4308.
10. Holland, B. T.; Blanford, C. F.; Stein, A. Science 1998, 281, 538. Holland, B. T.; Blanford, C. F.; Do, T.; Stein, A. Chem. Mater. 1999, 11, 795. Holland, B. T.; Abrams, L.; Stein, A. J. Am. Chem. Soc. 1999, 121, 4308.
11. Holland, B. T.; Blanford, C. F.; Stein, A. Science 1998, 281, 538. Holland, B. T.; Blanford, C. F.; Do, T.; Stein, A. Chem. Mater. 1999, 11, 795. Holland, B. T.; Abrams, L.; Stein, A. J. Am. Chem. Soc. 1999, 121, 4308.
12. Wijnhoven, J. E. G.; Vos, W. L. Science 1998, 281, 802.
13. Yin, J. S.; Wang, Z. L. Adv. Mater. 1999, 11, 469.
14. Yang, P. D.; Deng, T.; Zhao, D. Y.; Feng, P. Y.; Pine, D.; Chmelka, B. F.; Whitesides, G. M.; Stucky, G. D. Science 1998, 282, 2244.
15. Jiang, P.; Bertone, J. F., Colvin, V. L. Science 2001, 291, 453.
16. Park, S. H.; Xia, Y. N. Chem. Mater. 1998, 10, 1745. Park, S. H.; Xia, Y. N. Adv. Mater. 1998, 10, 1045.
17. Park, S. H.; Xia, Y. N. Chem. Mater. 1998, 10, 1745. Park, S. H.; Xia, Y. N. Adv. Mater. 1998, 10, 1045.
18. Gates, B.; Yin, Y.; Xia, Y. N. Chem. Mater. 1999, 11, 2827.
19. Johnson, S. A.; Ollivier, P. J.; Mallouk, T. E. Science 1999, 283, 963.
20. Jiang, P.; Cizeron, J.; Bertone, J. F.; Colvin, V. L. J. Am. Chem. Soc. 1999, 121, 11 630.
21. Yan, H. W.; Blanford, C. F.; Holland, B. T.; Parent, M.; Smyrl, W. H.; Stein, A. Adv. Mater. 1999, 11, 1003.
22. Velev, O. D.; Tessier, P. M.; Lenhoff, A. M.; Kaler, A. M. Nature 1999, 401, 548.
23. Jiang, P.; Cizeron, J.; Bertone, J. F.; Colvin, V. L. J. Am Chem. Soc. 1999, 121, 7957.
24. Vlaslov, Y. A.; Bo X.-Z.; Sturm, J. C.; Norris, D. J. Science 2001, 414, 289.
25. Braun, P. V.; Wiltzius, P. Nature 1999, 402, 603.
26. Many examples are included in the special issue Adv. Mater. 2001, 13(6).
27. Zakhidov, A. A.; Baughman, R. H.; Iqbal, Z.; Cui, C.; Khayrullin, I.; Dantas, S. O.; Marti, J.; Ralchenko, V. G. Science 1998, 282, 897.
28. Vlaslov, Y. A.; Bo X.-Z.; Sturm, J. C.; Norris, D. J. Science 2001, 414, 289.
29. Miguez, H.; Tetreault, N.; Yang, S. M.; Kitaev, V.; Ozin, G. A. Adv. Mater. 2003, 15, 597.
30. Meseguer, F.; Blanco, A.; Miguez, H.; Garcia-Santamaria, F.; Ibisate, M. ; Lopez, C. Colloids Surf. 2002, 202, 281.
31. Becker, J. S.; Gordon, R. G. Appl. Phys. Lett. 2003, 82, 2239. Becker, J. S.; Suh, S.; Gordon, R. G. Chem. Mater., ASAP Article, Web Release Date: June 20, 2003.
32. Becker, J. S.; Gordon, R. G. Appl. Phys. Lett. 2003, 82, 2239. Becker, J. S.; Suh, S.; Gordon, R. G. Chem. Mater., ASAP Article, Web Release Date: June 20, 2003.
33. Bogush, G. H.; Tracy, M. A.; Zukoski IV, C. F. J. Non-Cryst. Solids 1988, 104, 95.
34. Dimitrov, A. S.; Nagayama, K. Langmuir 1996, 12, 1303.
35. Jiang, P.; Bertone, J. F.; Hwang, K. S.; Colvin, V. L. Chem. Mater. 1999, 11, 2132.
36. Ritala, M.; Leskelä, M. Deposition and Processing. In Handbook of Thin Film Materials; Nalwa, H. S., Ed.; Academic Press: San Diego, CA, 2002; Vol. 1, p 103.
37. Gordon, R. G.; Hausmann, D.; Kim, E.; Shephard, J. Chem. Vap. Deposition 2003, 9, 73.