Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering

Applied Surface Science

Volumn 252, Issue 22, 2006, Pages 7983-7986

  Zong, Fujian ^a   Ma, Honglei ^a   Du, Wei ^a   Ma, Jin ^a   Zhang, Xijian ^a   Xiao, Hongdi ^a   Ji, Feng ^a   Xue, Chengshan ^b  

^a SHANDONG UNIVERSITY   (China)

^b SHANDONG NORMAL UNIVERSITY   (China)

Author keywords

Absorption coefficient; Optical band gap; Reactive rf magnetron sputtering; Zinc nitride films; Zinc nitride target

Indexed keywords

BAND STRUCTURE; LATTICE CONSTANTS; MAGNETRON SPUTTERING; NITRIDES; POLYCRYSTALLINE MATERIALS; SPECTROPHOTOMETERS; SYNTHESIS (CHEMICAL); ZINC COMPOUNDS;

ABSORPTION COEFFICIENT; OPTICAL BAND GAP; REACTIVE RF MAGNETRON SPUTTERING; ZINC NITRIDE FILMS; ZINC NITRIDE TARGET;

OPTICAL FILMS;

EID: 33747875402     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.10.006     Document Type: Article

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