SCOPUS 정보 검색 플랫폼

Dalton Transactions

Volumn , Issue 1, 2006, Pages 121-128

Mixed hydrazido amido/imido complexes of tantalum, hafnium and zirconium: Potential precursors for metal nitride MOCVD

(4) Baunemann, Arne a Kim, Younsoo a Winter, Manuela a Fischer, Roland A a

a RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMINES; CRYSTAL STRUCTURE; DERIVATIVES; HAFNIUM; HYDRAZINE; MASS SPECTROMETRY; NITRIDES; NITROGEN; NUCLEAR MAGNETIC RESONANCE; SCANNING ELECTRON MICROSCOPY; TANTALUM; ZIRCONIUM;

ALL-NITROGEN COORDINATED COMPOUNDS; COORDINATION CHEMISTRY; LIGAND; TETRACHLORIDES;

COMPLEXATION;

EID: 33645524184 PISSN: 14779226 EISSN: 14779234 Source Type: Journal
DOI: 10.1039/b512074h Document Type: Article

Times cited : (24)

References (34)

1
- 25144439913
- L. Peters Semicond. Int. 2003 263 50 52
- (2003) Semicond. Int. , vol.263 , pp. 50-52
- Peters, L.¹

2
- 0037766775
- H. Y. Yu H. F. Lim J. H. Chen M. F. Li C. Zhu C. H. Tung A. Y. Du W. D. Wang D. Z. Chi D.-L. Kwong IEEE Electron Device Lett. 2003 24 230
- (2003) IEEE Electron Device Lett. , vol.24 , pp. 230
- Yu, H.Y.¹ Lim, H.F.² Chen, J.H.³ Li, M.F.⁴ Zhu, C.⁵ Tung, C.H.⁶ Du, A.Y.⁷ Wang, W.D.⁸ Chi, D.Z.⁹ Kwong, D.-L.¹⁰

3
- 10744227666
- H. Y. Yu J. F. Kang C. Ren J. D. Chen Y. T. Hou S. Shen M. F. Li D. S. H. Chan K. L. Bera C. H. Tung D.-L. Kwong IEEE Electron Device Lett. 2004 25 70
- (2004) IEEE Electron Device Lett. , vol.25 , pp. 70
- Yu, H.Y.¹ Kang, J.F.² Ren, C.³ Chen, J.D.⁴ Hou, Y.T.⁵ Shen, S.⁶ Li, M.F.⁷ Chan, D.S.H.⁸ Bera, K.L.⁹ Tung, C.H.¹⁰ Kwong, D.-L.¹¹

4
- 4043157193
- A. Ishikawa T. Takata J. N. Kondo M. Hara K. Domen J. Phys. Chem. B 2004 108 11049 11053
- (2004) J. Phys. Chem. B , vol.108 , pp. 11049-11053
- Ishikawa, A.¹ Takata, T.² Kondo, J.N.³ Hara, M.⁴ Domen, K.⁵

5
- 33645521363
- M. Houssa, Institute of Physics Publishing, Bristol, pp. 17-64
- M. Ritala, in High-k Gate Dielectrics, ed., M. Houssa, Institute of Physics Publishing, Bristol, 2004, pp. 17-64
- (2004) High-k Gate Dielectrics, Ed.
- Ritala In, M.¹

6
- 25144483043
- and references therein;
- A. Baunemann D. Rische A. Milanov Y. Kim M. Winter C. Gemel R. A. Fischer Dalton Trans. 2005 3051 3056
- (2005) Dalton Trans. , pp. 3051-3056
- Baunemann, A.¹ Rische, D.² Milanov, A.³ Kim, Y.⁴ Winter, M.⁵ Gemel, C.⁶ Fischer, R.A.⁷

7
- 0034366468
- C. H. Winter Aldrichim. Acta 2000 33 3 12
- (2000) Aldrichim. Acta , vol.33 , pp. 3-12
- Winter, C.H.¹

8
- 13244252501
- J. E. Bleau C. J. Carmalt S. A. O'Neill I. P. Parkin A. J. P. White D. J. Williams Polyhedron 2005 24 463 468
- (2005) Polyhedron , vol.24 , pp. 463-468
- Bleau, J.E.¹ Carmalt, C.J.² O'Neill, S.A.³ Parkin, I.P.⁴ White, A.J.P.⁵ Williams, D.J.⁶

9
- 11144250826
- W. Wang T. Nabatame Y. Shimogaki Jpn. J. Appl. Phys. 2004 43 Part 2 L1445 L1448
- (2004) Jpn. J. Appl. Phys. , vol.43 , Issue.PART 2
- Wang, W.¹ Nabatame, T.² Shimogaki, Y.³

10
- 33751500052
- R. Fix R. G. Gordon D. M. Hoffman Chem. Mater. 1991 3 1138 1148
- (1991) Chem. Mater. , vol.3 , pp. 1138-1148
- Fix, R.¹ Gordon, R.G.² Hoffman, D.M.³

11
- 0000765347
- D. M. Hoffman Polyhedron 1994 13 1169 1179
- (1994) Polyhedron , vol.13 , pp. 1169-1179
- Hoffman, D.M.¹

12
- 33751385415
- R. Fix R. G. Gordon D. M. Hoffman Chem. Mater. 1993 5 614 619
- (1993) Chem. Mater. , vol.5 , pp. 614-619
- Fix, R.¹ Gordon, R.G.² Hoffman, D.M.³

13
- 0038102392
- B. Luo C. J. Cramer W. L. Gladfelter Inorg. Chem. 2003 42 3431 3437
- (2003) Inorg. Chem. , vol.42 , pp. 3431-3437
- Luo, B.¹ Cramer, C.J.² Gladfelter, W.L.³

14
- 0037430617
- J.-S. M. Lehn D. M. Hoffman Inorg. Chim. Acta 2003 345 327 332
- (2003) Inorg. Chim. Acta , vol.345 , pp. 327-332
- Lehn, J.-S.M.¹ Hoffman, D.M.²

15
- 0028115157
- C. H. Winter K. C. Jayaratne J. W. Proscia Mater. Res. Soc. Symp. Proc. 1994 327 103 108
- (1994) Mater. Res. Soc. Symp. Proc. , vol.327 , pp. 103-108
- Winter, C.H.¹ Jayaratne, K.C.² Proscia, J.W.³

16
- 33645512969
- 5,591,483
- C. H. Winter, T. S. Lewkebandara and K. C. Jayaratne, US Pat., 5,591,483, 1994
- (1994) US Pat.
- Winter, C.H.¹ Lewkebandara, T.S.² Jayaratne, K.C.³

17
- 0034275371
- M. Juppo M. Ritala M. Leskela J. Electrochem. Soc. 2000 147 3377 3381
- (2000) J. Electrochem. Soc. , vol.147 , pp. 3377-3381
- Juppo, M.¹ Ritala, M.² Leskela, M.³

18
- 0037109504
- K. T. Jacob R. Verma R. M. Mallya J. Mater. Sci. 2002 37 4465 4472
- (2002) J. Mater. Sci. , vol.37 , pp. 4465-4472
- Jacob, K.T.¹ Verma, R.² Mallya, R.M.³

19
- 5844424750
- D. K. Gaskill N. Bottka M. C. Lin J. Cryst. Growth 1986 77 418 423
- (1986) J. Cryst. Growth , vol.77 , pp. 418-423
- Gaskill, D.K.¹ Bottka, N.² Lin, M.C.³

20
- 33645503459
- D. A. Wierda C. Armado-Wierda Proc. Electrochem. Soc. 2000 2000-13 CVD XV 497 504
- (2000) Proc. Electrochem. Soc. , vol.2000 , Issue.13 CVD XV , pp. 497-504
- Wierda, D.A.¹ Armado-Wierda, C.²

21
- 0037840451
- Y.-S. Suh G. P. Heuss V. Misra D.-G. Park K.-Y. Lim J. Electrochem. Soc. 2003 150 F79 F82
- (2003) J. Electrochem. Soc. , vol.150
- Suh, Y.-S.¹ Heuss, G.P.² Misra, V.³ Park, D.-G.⁴ Lim, K.-Y.⁵

22
- 0033312420
- K. Shepherd J. Kelber Appl. Surf. Sci. 1999 151 287 298
- (1999) Appl. Surf. Sci. , vol.151 , pp. 287-298
- Shepherd, K.¹ Kelber, J.²

23
- 0036818894
- H.-L. Park K.-M. Byun W. J. Lee Jpn. J. Appl. Phys. 2002 41 6153 6164
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 6153-6164
- Park, H.-L.¹ Byun, K.-M.² Lee, W.J.³

24
- 22944455535
- Y. Kim A. Baunemann H. Parala A. Devi R. A. Fischer Chem. Vap. Deposition 2005 11 294 297
- (2005) Chem. Vap. Deposition , vol.11 , pp. 294-297
- Kim, Y.¹ Baunemann, A.² Parala, H.³ Devi, A.⁴ Fischer, R.A.⁵

25
- 33748494663
- A. S. Batsanov A. V. Churakov J. A. K. Howard A. K. Hughes A. L. Johnson A. J. Kingsley I. S. Neretin K. Wade J. Chem. Soc., Dalton Trans. 1999 3867 3875
- (1999) J. Chem. Soc., Dalton Trans. , pp. 3867-3875
- Batsanov, A.S.¹ Churakov, A.V.² Howard, J.A.K.³ Hughes, A.K.⁴ Johnson, A.L.⁵ Kingsley, A.J.⁶ Neretin, I.S.⁷ Wade, K.⁸

26
- 0036789492
- H. Sachdev Eur. J. Inorg. Chem. 2002 2681 2685
- (2002) Eur. J. Inorg. Chem. , pp. 2681-2685
- Sachdev, H.¹

27
- 33748215329
- N. Metzler H. Noth H. Sachdev Angew. Chem., Int. Ed. Engl. 1994 33 1746
- (1994) Angew. Chem., Int. Ed. Engl. , vol.33 , pp. 1746
- Metzler, N.¹ Noth, H.² Sachdev, H.³

28
- 84985729914
- K. Bode U. Klingebiel M. Noltemeyer H. Witte-Abel Z. Anorg. Allg. Chem. 1995 621 500
- (1995) Z. Anorg. Allg. Chem. , vol.621 , pp. 500
- Bode, K.¹ Klingebiel, U.² Noltemeyer, M.³ Witte-Abel, H.⁴

29
- 0000694549
- B. Germund H. Noth H. Sachdev M. Schmidt Chem. Ber. 1996 129 1335
- (1996) Chem. Ber. , vol.129 , pp. 1335
- Germund, B.¹ Noth, H.² Sachdev, H.³ Schmidt, M.⁴

30
- 0001157309
- A. Devi W. Rogge A. Wohlfart F. Hipler H.-W. Becker R. A. Fischer Chem. Vap. Deposition 2000 6 245 252
- (2000) Chem. Vap. Deposition , vol.6 , pp. 245-252
- Devi, A.¹ Rogge, W.² Wohlfart, A.³ Hipler, F.⁴ Becker, H.-W.⁵ Fischer, R.A.⁶

31
- 0001509973
- H.-T. Chiu S.-H. Chuang C.-E. Tsai G.-H. Lee S.-M. Peng Polyhedron 1998 17 2187 2190
- (1998) Polyhedron , vol.17 , pp. 2187-2190
- Chiu, H.-T.¹ Chuang, S.-H.² Tsai, C.-E.³ Lee, G.-H.⁴ Peng, S.-M.⁵

32
- 0000118641
- W. A. Nugent Inorg. Chem. 1983 22 965 969
- (1983) Inorg. Chem. , vol.22 , pp. 965-969
- Nugent, W.A.¹

33
- 37049138893
- D. C. Bradley M. H. Gitlitz J. Chem. Soc. A 1969 980 984
- (1969) J. Chem. Soc. A , pp. 980-984
- Bradley, D.C.¹ Gitlitz, M.H.²

34
- 0001729433
- U. Wannagat F. Hoefler Monatsh. Chem. 1966 97 976 983
- (1966) Monatsh. Chem. , vol.97 , pp. 976-983
- Wannagat, U.¹ Hoefler, F.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.