Chemical vapour deposition of coatings

Progress in Materials Science

Volumn 48, Issue 2, 2003, Pages 57-170

  Choy, K L ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON CARBON COMPOSITES; CERAMIC MATRIX COMPOSITES; CHEMICAL REACTIONS; CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; FUNCTIONALLY GRADED MATERIALS; METALLIC FILMS; MICROELECTRONICS; MULTILAYERS; NANOSTRUCTURED MATERIALS; OPTOELECTRONIC DEVICES; OXIDATION; POWDERS; SEMICONDUCTOR MATERIALS; THERMODYNAMICS; THIN FILMS;

CHEMICAL VAPOR INFILTRATION;

COATINGS;

EID: 0037207605     PISSN: 00796425     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0079-6425(01)00009-3     Document Type: Review

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