Properties of TiN films on heated substrate below 550°C by 50 Hz plasma-enhanced chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 3 A, 2000, Pages 1299-1302

  Yoshino, Masaki ^a   Shimozuma, Mitsuo ^b   Date, Hiroyuki ^b   Rodrigo, Adolfo ^c   Tagashira, Hiroaki ^d  

^a HOKKAIDO POLYTECHNIC COLLEGE   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

^c DEPARTAMENTO DE FÍSICA   (Argentina)

^d MURORAN INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Low frequency plasma; Plasma enhanced CVD; Surface hardening material; Thin film deposition; Titanium nitride

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; THIN FILMS; VICKERS HARDNESS TESTING; X RAY DIFFRACTION ANALYSIS;

LOW FREQUENCY PLASMA; SUBSTRATE BIAS CIRCUIT; SURFACE HARDENING MATERIAL; TITANIUM NITRIDE FILMS;

TITANIUM NITRIDE;

EID: 0033741923     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.1299     Document Type: Article

References (16)

1. R. Buhl, H. K. Pulker and E. Moll: Thin Solid Films 80 (1981) 265.
2. A. Sherman: Jpn. J. Appl. Phys. 30 (1991) 3553.
3. H. Hahn and W. Palich: J. Biomed. Mater. Res. 4 (1970) 571.
4. K. Kawata: Surf. & Coat. Technol. 54/55 (1992) 604.
5. J. Laimer, H. Stori and P. Rodhammer: J. Vac. Sci. & Technol A 7 (1989) 2952.
6. M. Shimozuma, H. Date, T. Iwasaki, H. Tagashira, M. Yoshino and K. Yoshida: J. Vac. Sci. & Technol. A 15(1997) 1897 [Erratum: 15 (1997) 3170].
7. M. Shimozuma, G. Tochitani and H. Tagashira: J. Appl. Phys. 70 (1991) 645.
8. M. Shimozuma, K. Kitamori, H. Ohno, H. Hasegawa and H. Tagashira: J. Electron. Mater. 14 (1985) 573.
9. M. Shimozuma, M. Ishikawa, G. Tochitani and H. Tagashira: J. IEE Jpn. 111 (1991) 1064.
10. M. Shimozuma, G. Tochitani, H. Ohno, H. Tagashira and J. Nakahara: J. Appl. Phys. 66 (1989) 447.
11. R. W. B. Pearse and A. G. Gaydon: The Identification of Molecular Spectra (Chapman and Hall, 1976).
12. F. M. Phelps: M. I. T. Wavelength Tables (MIT Press, Cambridge, 1969).
13. A. B. Rodrigo, C. Lasorsa, M. Shimozuma, F. Alvarez and P. Perillo: J. Phys. D 30 (1997) 2397.
14. K. Oguri, H. Fujita and T. Arai: Thin Solid Films 195 (1991) 77.
15. T. Akahori, A. Tanihara and M. Tano: Jpn. J. Appl. Phys. 30 (1991) 3558.
16. J. Laimer, H. Stori and P. Rodhammer: Thin Solid Films 191 (1990) 77.