SCOPUS 정보 검색 플랫폼

Volumn 106, Issue , 1996, Pages 268-274

Titanium nitride thin film deposition by laser CVD

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GAS LASERS; LASER BEAM EFFECTS; THIN FILMS; TITANIUM NITRIDE; TOOL STEEL;

LASER INDUCED CHEMICAL VAPOR DEPOSITION; TITANIUM NITRIDE THIN FILMS;

CHEMICAL VAPOR DEPOSITION;

EID: 0030566023 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00446-1 Document Type: Article

Times cited : (25)

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