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Volumn , Issue 28, 2008, Pages 3715-3722

Mixed amido/imido/guanidinato complexes of niobium: Potential precursors for MOCVD of niobium nitride thin films

(7) Baunemann, Arne a Bekermann, Daniela a Thiede, Tobias B a Parala, Harish a Winter, Manuela a Gemel, Christian a Fischer, Roland A a

a RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; LIGANDS; MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR STRUCTURE; NITRIDES; ORGANIC CHEMICALS; ORGANOMETALLICS; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION;

CARBON-FREE; CHN ANALYSIS; METAL ORGANIC CHEMICAL VAPOUR DEPOSITIONS; MIXED-LIGANDS; NIOBIUM NITRIDE; SINGLE MOLECULE SOURCES; SINGLE-CRYSTAL X-RAY DIFFRACTION STUDIES; STARTING COMPOUNDS;

NIOBIUM COMPOUNDS;

EID: 46949100282 PISSN: 14779226 EISSN: 14779234 Source Type: Journal
DOI: 10.1039/b719688a Document Type: Article

Times cited : (51)

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