Fourier transform infrared spectroscopy studies on thermal decomposition of tetrakis-dimethyl-amido zirconium for chemical vapor deposition of ZrN

Korean Journal of Chemical Engineering

Volumn 21, Issue 6, 2004, Pages 1256-1259

  Kim, Ihl Woo ^a   Kim, Sung Jae ^a   Kim, Do Heyoung ^a   Woo, Heegweon ^b   Park, Man Yong ^c   Rhee, Shi Woo ^c  

^a Research Institute for Catalysis   (South Korea)

^b Chonnam National University   (South Korea)

^c Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

CVD; FTIR; Thin Films; Zirconium Nitrides

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CORROSION RESISTANCE; DISSOCIATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MASS TRANSFER; MICROELECTRONICS; ORGANOMETALLICS; PYROLYSIS; SUPERCONDUCTING TRANSITION TEMPERATURE; SURFACE REACTIONS; THERMOCOUPLES; THIN FILMS;

GAS PHASE MASS TRANSFER; GAS PHASE REACTIONS; TRANSIENT METAL NITRIDE THIN FILMS; ZIRCONIUM NITRIDE;

ZIRCONIUM COMPOUNDS;

EID: 13444278632     PISSN: 02561115     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02719504     Document Type: Article

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