Growth of Fe3N films via chemical vapor deposition of iron acetylacetonate and anhydrous ammonia

Thin Solid Films

Volumn 326, Issue 1-2, 1998, Pages 47-50

  Roberson, S L ^a   Finello, D ^b   Banks, A D ^a   Davis, R F ^a  

^a North Carolina State University   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Chemical vapor deposition; Depositing process; Iron; Nitrides

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GRAIN SIZE AND SHAPE; IRON COMPOUNDS; NITRIDES; POLYCRYSTALLINE MATERIALS; X RAY DIFFRACTION ANALYSIS;

IRON NITRIDE;

THIN FILMS;

EID: 0032482861     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00571-9     Document Type: Article

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