Energetic cluster ion beams: Modification of surfaces and shallow layers

Materials Science and Engineering R: Reports

Volumn 72, Issue 7-8, 2011, Pages 137-157

  Popok, V N ^a  

^a UNIVERSITY OF ROSTOCK   (Germany)

Author keywords

Atomic and molecular clusters; Cluster ion beams; Cluster ion implantation; Cluster surface interaction; Surface sputtering

Indexed keywords

ATOMS; ION IMPLANTATION; IONS; RADIATION DAMAGE; SURFACE TREATMENT;

ATOMIC AND MOLECULAR CLUSTERS; CLUSTER ION BEAMS; CLUSTER ION IMPLANTATION; CLUSTER-SURFACE INTERACTIONS; SURFACE SPUTTERING;

ION BEAMS;

EID: 79958179420     PISSN: 0927796X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mser.2011.03.001     Document Type: Review

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