Gas cluster ion beam applications and equipment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 830-837

  Kirkpatrick, Allen ^a  

^a Epion Corporation   (United States)

Author keywords

Applications; Cluster; Equipment; Gas; GCIB; Ion

Indexed keywords

BEAM PLASMA INTERACTIONS; PLASMA ETCHING; TARGETS;

GAS CLUSTER ION BEAMS (GCIB);

ION BEAMS;

EID: 0038750918     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00858-9     Document Type: Conference Paper

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