Ion beam modification of solids: Towards intelligent materials

Materials Science and Engineering: A

Volumn 253, Issue 1-2, 1998, Pages 30-41

  Takagi, Toshinori ^a,b  

^a Ion Engineering Institute Corporation   (Japan)

^b Hiroshima Institute of Technology   (Japan)

Author keywords

Cluster; Intelligent material; Ion engineering technology; Ionized cluster beam; Thin film formation

Indexed keywords

COMPOSITION; CRYSTAL STRUCTURE; FILM PREPARATION; ION BEAMS; MULTILAYERS; SURFACE TREATMENT; SYNTHESIS (CHEMICAL); THIN FILMS;

ION BEAM ENGINEERING; ION BEAM MODIFICATION; IONIZED CLUSTER BEAM; THIN FILM FORMATION;

INTELLIGENT MATERIALS;

EID: 0002841114     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(98)00707-2     Document Type: Article

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