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Volumn 207, Issue 2, 2003, Pages 145-153
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Nanohillock formation by impact of small low-energy clusters with surfaces
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Author keywords
Atomic force microscopy; Cluster ion implantation; Nanosize hillock; Pulsed cluster source
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ION BEAMS;
NOZZLES;
SUBSTRATES;
PULSED CLUSTER SOURCES;
ION IMPLANTATION;
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EID: 0037508504
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(03)00616-5 Document Type: Article |
Times cited : (26)
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References (22)
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