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Volumn 207, Issue 2, 2003, Pages 145-153

Nanohillock formation by impact of small low-energy clusters with surfaces

Author keywords

Atomic force microscopy; Cluster ion implantation; Nanosize hillock; Pulsed cluster source

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BEAMS; NOZZLES; SUBSTRATES;

EID: 0037508504     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00616-5     Document Type: Article
Times cited : (26)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.