Nanoparticle impact micromachining

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2362-2364

  Gruber, A ^a   Gspann, J ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001580521     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589647     Document Type: Article

References (7)

1. J. Gspann, Nucl. Instrum. Methods Phys. Res. B 112, 86 (1996).
2. J. Gspann, in From Clusters to Crystals, edited by P. Jena, S. N. Khanna, and B. K. Rao (Kluwer, Dordrecht, 1992), Vol. 2, p. 1115.
3. J. Gspann, J. Vac. Sci. Technol. B 13, 2618 (1995).
4. P. von Blanckenhagen, A. Gruber, and J. Gspann, Nucl. Instrum. Methods Phys. Res. B 122, 322 (1997).
5. P. R. W. Henkes and R. Klingelhöfer, J. Phys. (Paris) Colloq. 50, 159 (1989).
6. J. Gspann and H. Vollmar, J. Chem. Phys. 73, 1657 (1980).
7. J. Gspann, Sens. Actuators A 51, 37 (1995).