Incident angle dependence of the sputtering effect of Ar-cluster-ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 489-492

  Kitani, H ^a   Toyoda, N ^a   Matsuo, J ^a   Yamada, I ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ARGON; COPPER; ION BEAMS; ION BOMBARDMENT; SURFACE ROUGHNESS; THIN FILMS;

CLUSTER ION BEAMS; INCIDENT ANGLE;

SPUTTERING;

EID: 0031546165     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00556-3     Document Type: Article

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