Reactive accelerated cluster erosion (RACE) by ionized cluster beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 86-88

  Gspann, Jürgen ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; DEPOSITION; DIAMONDS; GLASS; ION BOMBARDMENT; PARTICLE ACCELERATORS; SILICON; SULFUR COMPOUNDS; SURFACES; THIN FILMS;

HYPERVELOCITY CLUSTER IMPACTS; IONIZED CLUSTER BEAMS; REACTIVE ACCELERATED CLUSTER EROSION (RACE);

ION BEAM LITHOGRAPHY;

EID: 0030563523     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01252-4     Document Type: Article

References (5)

1. T. Takagi, Ionized-cluster beam deposition and epitaxy (Noyes, 1988).
2. J. Gspann, Z. Phys. D 26 (1993) S174.
3. J. Gspann, From clusters to crystals, eds. P. Jena et al., vol. 2 (Kluwer Academic Publisher, 1992) p. 1115.
4. J. Gspann, Sensors and Actuators A 51 (1995) 37.
5. Z. Insepov, M. Sosnowski and I. Yamada, Laser and Ion Beam Modification of Materials, Trans. Mater. Res. Soc. Jpn., vol. 17 (Elsevier, 1994) p. 111.