Surface morphology of PMMA surfaces bombarded with size-selected gas cluster ion beams

Surface and Interface Analysis

Volumn 43, Issue 1-2, 2011, Pages 120-122

  Ichiki, K ^a   Ninomiya, S ^a,b   Nakata, Y ^a   Yamada, H ^a   Seki, T ^a,b   Aoki, T ^a,b   Matsuo, J ^a,b  

^a KYOTO UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Ar cluster; cluster size; PMMA; surface roughness

Indexed keywords

AFM; AR CLUSTER; AVERAGE SURFACE ROUGHNESS; CLUSTER ION BEAMS; CLUSTER ION SIZE; CLUSTER SIZES; GAS CLUSTER ION BEAMS; HIGH-SPEED; LARGE CLUSTERS; PMMA; SMALL CLUSTERS; SPUTTERING RATE; TIME-OF-FLIGHT METHOD; TOTAL ENERGY;

ARGON; CLUSTER ANALYSIS; ETCHING; ION BEAMS; IONS; METAL ANALYSIS; MORPHOLOGY; SPUTTERING; SURFACE PROPERTIES; SURFACE ROUGHNESS;

SURFACE MORPHOLOGY;

EID: 78951485728     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3444     Document Type: Conference Paper

References (22)

1. Y. Iida, H. Okabayashi, K. Suzuki, Jpn. J. Appl. Phys. 1977, 13, 1313.
2. W. E. Vanderlinde, A. L. Ruoff,. J. Vac. Sci. Tech. B 1988, 6, 1621.
3. H. Dong, T. Bell,. Sur. Coat. Tech. 1999, 111, 29.
4. N. Mine, B. Douhard, J. Brison, L. Houssiau, Rapid. Comm. Mass. Spectrom. 2007, 21, 2680.
5. H. G. Cramer, T. Grehl, F. Kollmer, R. Moellers, E. Niehuis, D. Rading, Appl. Sur. Sci. 2008, 255, 966.
6. J. Cheng, A. Wucher, N. Winograd,. J. Phys. Chem. B 2006, 110, 8329.
7. C. M. Mahoney, S. V. Roberson, G. Gillen, Anal. Chem. 2004, 76, 3199.
8. C. Szakal, S. Sun, A. Wucher, N. Winograd, Appl. Sur. Sci. 2004, 231-32, 183.
9. C. M. Mahoney, Mass. Spectrom. Rev. 2010, 29, 247.
10. C. M. Mahoney, A. J. Fahey, G. Gillen, C. Xu, J. D. Batteas,. Appl. Sur. Sci. 2005, 252, 6502.
11. S. Ninomiya, K. Ichiki, H. Yamada, Y. Nakata, T. Seki, T. Aoki, J. Matsuo, Rapid. Comm. Mass. Spectrom. 2009, 23, 1601.
12. S. Ninomiya, Y. Nakata,., K. Ichiki, T. Seki, T. Aoki, J. Matsuo, Nucl Instrum. Meth. B 2007, 256, 493.
13. K. Ichiki, S. Ninomiya, Y. Nakata, Y. Honda, T. Seki, T. Aoki, J. Matsuo, Appi. Sur. Sci. 2008, 255, 1148.
14. T. Seki, T. Murase, J. Matsuo, Nucl. Instr. Meth. B 2006, 242, 179.
15. N. Toyoda, S. Houzumi, I. Yamada, Nucl. Instr. Meth. B 2006, 242, 466.
16. L. Rzeznik, R. Paruch, B. Czerwinski, B. J. Garrison, Z. Postawa,. Vacuum 2009, 83, 5155.
17. A. Delcorte, B. J. Garrison, K. Hamraoui,. Anal. Chem. 2009, 81, 6676.
18. A. G. Shard, F. M. Green, P. J. Brewer, M. P. Seah, I. S. Gilmore, J. Phys. Chem. B 2008, 112, 2596.
19. T. Aoki, J. Matsuo, G. Takaoka, I. Yamada, Nucl. Instrum. Meth. B 2003, 202, 278.
20. T. Aoki, J. Matsuo, G. Takaoka, I. Yamada, Nucl. Instrum. Meth. B 2003, 206, 861.
21. N. Toyoda, S. Houzumi, I. Yamada, Nucl. Instr. Meth. B 2006, 242, 466.
22. I. Yamada, J. Matsuo, N. Toyoda, A. Kirkpatrick, Mater. Sci. Eng, R 2001, 34, 231.