Simulations of thin film deposition from atomic and cluster beams

Materials Science and Engineering B

Volumn 37, Issue 1-3, 1996, Pages 1-7

  Gilmer, G H ^a   Roland, C ^b   Stock, D ^c   Jaraiz, M ^a   Diaz De La Rubia, T ^d  

^a LUCENT TECHNOLOGIES   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

^c FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^d LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Amorphous films; Cluster beams; Molecular beam epitaxy; Molecular dynamics

Indexed keywords

EID: 0042538550     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(95)01449-7     Document Type: Article

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