A model for damage caused by cluster implantation: Non-linear effect due to damage overlap

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 503-505

  Shao, Lin ^a   Nastasi, Michael ^a   Wang, Xuemei ^b   Liu, Jiarui ^b   Chu, Wei Kan ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b University of Houston   (United States)

Author keywords

Cluster implantation; Cluster ion solid interaction; Non linear damages

Indexed keywords

ATOMS; ION IMPLANTATION; MATHEMATICAL MODELS;

CASCADES; CLUSTER IMPLANTATION; CLUSTER ION-SOLID INTERACTION; NON-LINEAR DAMAGES;

NONLINEAR SYSTEMS;

EID: 28544449347     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.194     Document Type: Conference Paper

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