Craters on silicon surfaces created by gas cluster ion impacts

Journal of Applied Physics

Volumn 92, Issue 7, 2002, Pages 3671-3678

  Allen, L P ^a   Insepov, Z ^b   Fenner, D B ^a   Santeufemio, C ^a   Brooks, W ^a   Jones, K S ^c   Yamada, I ^b  

^a Epion Corporation   (United States)

^b UNIVERSITY OF HYOGO   (Japan)

^c University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; CLUSTER IMPACT; CRATER DEPTH; CROSS SECTION; FLUENCES; FOUR-FOLD SYMMETRY; GAS CLUSTERS; GAS SOURCES; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPES; HYBRID MOLECULAR DYNAMICS; LOWER ENERGIES; SI (1 1 1); SI(1 0 0); SI(111) SUBSTRATE; SILICON SURFACES; THREE-FOLD SYMMETRY;

ARGON; ATOMIC FORCE MICROSCOPY; ION BOMBARDMENT; MOLECULAR DYNAMICS; SURFACE ROUGHNESS; SURFACES; TRANSMISSION ELECTRON MICROSCOPY;

SILICON;

EID: 18644362748     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1506422     Document Type: Article

References (27)

1. J. -H. Song, S. N. Kwon, D. -K. Choi, and W. -K. Choi, Nucl. Instrum. Methods Phys. Res. B 179, 568 (2001). nibNIMBEU0168-583X
2. I. Yamada, J. Matsuo, N. Toyoda, and A. Kirkpatrick, Mater. Sci. Eng., R. 34, 231 (2001). msrMIGIEA0927-796X
3. P. von Blanckenhagen, A. Gruber, and J. Gspann, Nucl. Instrum. Methods Phys. Res. B 122, 322 (1997). nibNIMBEU0168-583X
4. A. Gruber and J. Gspann, J. Vac. Sci. Technol. B 15, 2362 (1997). jvbJVTBD90734-211X
5. I. Yamada, J. Matsuo, Z. Insepov, D. Takeuchi, M. Akizuki, and N. Toyoda, J. Vac. Sci. Technol. A 14, 781 (1996). jvaJVTAD60734-2101
6. H. Hsieh, R. S. Averback, H. Sellers, and C. P. Flynn, Phys. Rev. B 45, 4417 (1992). prbPRBMDO0163-1829
7. Z. Insepov and I. Yamada, Mater. Sci. Eng., A 217, 89 (1996). msaMSAPE30921-5093
8. D. B. Fenner, R. P. Torti, L. P. Allen, N. Toyoda, A. R. Kirkpatrick, J. A. Greer, V. DiFilippo, and J. Hautala, Mater. Res. Soc. Symp. Proc. 585, 27 (2000). mrsMRSPDH0272-9172
9. Z. Insepov, M. Sosnowski, and I. Yamada, Trans. Mater. Res. Soc. Jpn. 17, 111 (1994). tmrTMRJE31382-3469
10. I. Yamada and J. Matsuo, Mater. Res. Soc. Symp. Proc. 396, 149 (1996). mrsMRSPDH0272-9172
11. I. Yamada and J. Matsuo, Mater. Res. Soc. Symp. Proc. 427, 265 (1996). mrsMRSPDH0272-9172
12. D. B. Fenner, J. Hautala, L. P. Allen, T. G. Tetrault, A. Al-Jibouri, J. I. Budnick, and K. S. Jones, J. Vac. Sci. Technol. A 19, 1207 (2001). jvaJVTAD60734-2101
13. I. Yamada, W. L. Brown, J. A. Northby, and M. Sosnowski, Nucl. Instrum. Methods Phys. Res. B 82, 223 (1993). nibNIMBEU0168-583X
14. Z. Insepov and I. Yamada, Nucl. Instrum. Methods Phys. Res. B 99, 248 (1995). nibNIMBEU0168-583X
15. M. Moseler, J. Nordiek, and H. Haberland, Phys. Rev. B 56, 15439 (1997). prbPRBMDO0163-1829
16. Z. Insepov, M. Sosnowski, and I. Yamada, Nucl. Instrum. Methods Phys. Res. B 127, 269 (1997). nibNIMBEU0168-583X
17. Z. Insepov, R. Manory, J. Matsuo, and I. Yamada, Phys. Rev. B 105, 11605 (2000). prbPRBMDO0163-1829
18. Y. B. Zeldovich and Y. P. Raiser, Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena (Academic, New York, 1967), p. 653.
19. L. D. Landau and E. M. Lifshitz, Theory of Elasticity (Pergamon, Oxford, 1986).
20. Handbook of Chemistry and Physics, edited by D. R. Lide (CRC Press, London, 1993), p. 4-1.
21. H. Haberland, Clusters of Atoms and Molecules I (Springer, Berlin, 1995), Chap. 3.
22. J. Farges, M. F. DeFeraudy, B. Raoult, and G. Torchet, Ber. Bunsenges. Phys. Chem. 88, 211 (1984). bbpBBPCAX0005-9021
23. J. Won Lee and G. D. Stein, J. Phys. Chem. 91, 2450 (1987). jchJPCHAX0022-3654
24. L. P. Allen, K. S. Jones, C. Santeufemio, W. Brooks, D. B. Fenner, and J. Hautala, Proceedings of the Near Surface Effects Conference, 5-10 August 2001, Kodiak Island, Alaska, p. 16
25. (woodc@onr.navy.mil, ONR, Arlington, VA).
26. L. P. Allen, D. B. Fenner, C. Santeufemio, W. Brooks, J. Hautala, and Y. Shao, in Proceedings of the SPIE International Symposium on Optical Science and Technology, 7-11 July 2002, Seattle, WA, Vol. 4806, p. 225.
27. D. B. Fenner, D. W. Dean, V. DiFilippo, L. P. Allen, J. Hautala, and P. B. Mirkarimi, Mater. Res. Soc. Symp. Proc. 647, O5.2.1 (2001). mrsMRSPDH0272-9172