Gold-cluster ranges in aluminium, silicon and copper

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 212, Issue 1-4, 2003, Pages 56-62

  Andersen, H H ^a   Johansen, A ^a   Olsen, M ^a   Touboltsev, V ^a,b  

^a UNIVERSITY OF COPENHAGEN   (Denmark)

^b UNIVERSITY OF JYVÄSKYLÄ   (Finland)

Author keywords

Clusters; Non linear effects; Nuclear stopping; Range straggling; Ranges

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; COPPER; DIFFUSION;

NONLINEAR EFFECTS;

ION IMPLANTATION;

EID: 0242332626     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01479-4     Document Type: Conference Paper

References (29)

1. Andersen H.H., Bay H.L. J. Appl. Phys. 45:1974;953.
2. Davies J.A. Williams J.S., Poate J.S. Ion Implantation and Beam Processing. 1984;81 Academic Press, Sydney.
3. Andersen H.H. Kgl. Danske Videnskab. Selskab. Mat. Fys. Medd. 43:1993;127.
4. Tsai M.Y., Day D.S., Streetman B.G., Williams P.W. J. Appl. Phys. 50:1979;188.
5. Tsai M.Y., Streetman B.G. J. Appl. Phys. 50:1979;183.
6. Fuse G., Hiraro T., Inoue K., Takanagi S., Yamagashi Y. J. Appl. Phys. 53:1982;3650.
7. Wilson R.G. J. Appl. Phys. 54:1983;6879.
8. Brotherton S.D., Gowers J.P., Clegg J.B. J. Appl. Phys. 60:1986;3567.
9. Wu I.W., Fulko R.T., Mikkelsen J.C. Jr. J. Appl. Phys. 60:1986;2422.
10. Ridgway M.C., Scanlon P.T., Whitton J.L. J. Appl. Phys. 62:1987;3682.
11. Mc Phail D.S., Dowsett M.D., Parker E.H.C. Benninghoven A., Cotton R.J., Simms D.S., Werner H.W. Secondary Ion Mass Spectrometry V. 1986;343 Springer, Berlin.
12. Felch S.B., Powell R.A. Nucl. Instr. and Meth. B. 21:1987;486.
13. Wilson S.R., Paulson W.M., Gregory R.B., Lamartine J.A., Leavitt J.A., McIntyre L.C. Jr., Seerveld J.L. Nucl. Instr. and Meth. B. 21:1987;432.
14. Yamada I., Matsuo J., Jones E.C., Takeuchi D., Aoki T., Goto K., Sugii T. Mat. Res. Soc. Symp. Proc. 436:1997;363.
15. Takeuchi D., Shimada N., Matsuo J., Yamada I. Nucl. Instr. and Meth. B. 121:1997;345.
16. Liang J.-H., Chiang S.-L., Chen C.-T., Niu H., Tseng M.-S. Nucl. Instr. and Meth. B. 3190:2002;771.
17. Shulga V.I., Sigmund P. Nucl. Instr. and Meth. B. 47:1990;236.
18. Sigmund P. J. Phys. 50(C2):1989;175.
19. Sigmund P. J. Vac. Sci. Technol. A. 7:1989;585.
20. Shulga V.I. Nucl. Instr. and Meth. B. 58:1991;422.
21. Yamamura Y., Muramoto T. Phys. Rev. Lett. 69:1992;1463.
22. J. Peltola, K. Nordlund, Phys. Rev. B (in press, 2003).
23. Andersen H.H., Brunelle A., Della-Negra S., Depauw J., Jacquet D., LeBeyec Y. Phys. Rev. Lett. 80:1998;5433.
24. Bouneau S., Brunelle A., Della-Negra S., Depauw J., Jacquet D., Le Beyec Y., Pautrat M., Fallavier M., Poizat J.C., Andersen H.H. Phys. Rev. B. 65:2002;144106-1.
25. Liu J., Wang X., Shao L., Lu X., Chu W-K. Nucl. Instr. and Meth. B. 190:2002;787.
26. He W.-H., Karg H.-S., Shen D.-Y., Nie R., Shen Y.-X., Ding F.-R. Nucl. Instr. and Meth. B. 201:2003;449.
27. Andersen H.H., Bay H.L. Behrisch R. Sputtering by Ion Bombardment I. 1977;104 Springer, Berlin, Heidelberg.
28. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Solids. 1985;Pergamon, New York.
29. Behar M., Fichtner R.P., Olivieri C.A., De Souza J.P., Zawislak F.C., Biersack J.P. Nucl. Instr. and Meth. B. 6:1985;453.