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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 132, Issue 4, 1997, Pages 571-577

Sputtering and defect production by focused gold cluster ion beam irradiation of silicon

(4) Dobeli M a Nebiker, P W a Muhle R a Suter, M a

a ETH ZURICH (Switzerland)

Author keywords

Cluster ions; Crystal defects; Focused ion beam; Radiation damage; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; ION BEAMS; OPTICAL PROPERTIES; SILICON; SPUTTERING; SURFACE STRUCTURE;

CLUSTERS; FOCUSED ION BEAMS; SURFACE DEFECTS;

ION BOMBARDMENT;

EID: 0031344031 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00499-0 Document Type: Article

Times cited : (15)

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