Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

Review of Scientific Instruments

Volumn 73, Issue 12, 2002, Pages 4283-4287

  Popok, V N ^a   Prasalovich, S V ^a   Samuelsson, M ^a   Campbell, E E B ^a  

^a UNIVERSITY OF GOTHENBURG   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

GRAPHITE; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; SUBSTRATES;

CLUSTER IMPLANTATION;

NUCLEAR INSTRUMENTATION;

EID: 0036933104     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1518790     Document Type: Article

References (26)

1. P. Milani and S. Iannotta, Cluster Beam Synhtesis of Nanostructured Materials (Springer, Berlin, 1999).
2. T. Takagi, Mater. Sci. Eng., A 253, 30 (1998).
3. W. A. De Heer, Rev. Mod. Phys. 65, 611 (1993).
4. Clusters of Atoms and Molecules, edited by H. Haberland (Springer, Berlin, 1994).
5. E. E. B. Campbell and I. V. Hertel, Nucl. Instrum. Methods Phys. Res. B 112, 48 (1996).
6. A. V. Glotov and E. E. B. Campbell, Phys. Rev. A 62, 033202 (2000).
7. E. E. B. Campbell and F. Rohmund, Rep. Prog. Phys. 63, 1061 (2000).
8. T. Takagi, I. Yamada, and A. Sasaki, Thin Solid Films 39, 207 (1976).
9. I. Yamada and J. Matsuo, Mater. Res. Soc. Symp. Proc. 427, 265 (1996).
10. I. Yamada and J. Matsuo, Mater. Sci. Semicond. Process. 1, 27 (1998).
11. R. D. Levine, in The Physics and Chemistry of Clusters, edited by E. E. B. Campbell and M. Larsson (World Scientific, Singapore, 2001), p. 110.
12. M. Togo, K. Noda, and T. Tanigawa, Tech. Dig. - Int. Electron Devices Meet. 347 (1998).
13. J. O. Borland, Semicond. Int. 4, (2001).
14. M. Akizuki, J. Matsuo, I. Yamada, M. Harada, S. Ogasawara, and A. Doi, Nucl. Instrum. Methods Phys. Res. B 112, 83 (1996).
15. S. A. Klopcic and M. F. Jarrold, J. Chem. Phys. 106, 8855 (1997).
16. J. Matsuo, E. Minami, M. Saito, N. Toyoda, H. Katsumata, and I. Yamada, Eur. Phys. J. D 9, 635 (1999).
17. J.-H. Song, S. N. Kwon, D.-K. Choi, and W.-K. Choi, Nucl. Instrum. Methods Phys. Res. B 179, 568 (2001).
18. J.-H. Song and W.-K. Choi, Nucl. Instrum. Methods Phys. Res. B 190, 792 (2002).
19. W. C. Wiley and I. H. MCLaren, Rev. Sci. Instrum. 26, 1150 (1955).
20. O. F. Hagena, Surf. Sci. 106, 101 (1981).
21. W. Miehle, O. Kandler, T. Leisner, and O. Echt, J. Chem. Phys. 91, 5940 (1989).
22. I. Yamada, J. Matsuo, Z. Insepov, T. Aoki, T. Seki, and N. Toyoda, Nucl. Instrum. Methods Phys. Res. B 164-165, 944 (2000).
23. S. M. M. Ramos, N. Bonardi, B. Canut, S. Bouffard, and S. Della-Negra, Nucl. Instrum. Methods Phys. Res. B 143, 319 (1998).
24. M. Döbeli, F. Ames, C. R. Musil, L. Scandella, M. Suter, and H. A. Synal, Nucl. Instrum. Methods Phys. Res. B 143, 503 (1998).
25. P. Thevenard, J. P. Dupin, V. T. Birth, S. T. Purcell, V. Semet, and D. Guillot, Nucl. Instrum. Methods Phys. Res. B 166-167, 788 (2000).
26. P. Thevenard, J. P. Dupin, B. V. Thien, S. T. Purcell, and V. Semet, Surf. Coat. Technol. 128-129, 59 (2000).