Stable optical thin film deposition with O2 cluster ion beam assisted deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 875-879

  Toyoda, N ^a   Fujiwara, Y ^a   Yamada, I ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster; Ion assist deposition; Surface smoothing

Indexed keywords

CURRENT DENSITY; ION BEAM ASSISTED DEPOSITION; IRRADIATION; OPTICAL FILMS; OXYGEN; SURFACE PHENOMENA;

SURFACE SMOOTHING;

THIN FILMS;

EID: 0038412781     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00882-6     Document Type: Conference Paper

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