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Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 677-682
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Low damage smoothing of magnetic material films using a gas cluster ion beam
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Author keywords
Gas cluster ion beam; Ion irradiation damage; Magnetic materials; Surface smoothing
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Indexed keywords
CRYSTAL STRUCTURE;
ION BEAMS;
MAGNETIC MATERIALS;
SECONDARY ION MASS SPECTROMETRY;
SURFACE PROPERTIES;
X RAY DIFFRACTION;
GAS CLUSTER ION BEAM;
ION IRRADIATION DAMAGE;
SURFACE SMOOTHING;
THIN FILMS;
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EID: 33947620998
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2007.01.110 Document Type: Article |
Times cited : (19)
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References (7)
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