Isolated cluster ion impact on solid surfaces HOPG, Si and Cu(TiO2)/Si surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 792-796

  Song, Jae Hoon ^a   Choi, Won Kook ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Cluster ion; Embossment; Hillock; Isolated ion impact

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; COPPER COMPOUNDS; ELECTRIC POTENTIAL; ION BEAMS; ION BOMBARDMENT; SILICON WAFERS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ISOLATED ION IMPACT;

HIGH ENERGY PHYSICS;

EID: 0036570193     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01247-2     Document Type: Conference Paper

References (9)