Molecular dynamics simulations of surface smoothing and sputtering process with glancing-angle gas cluster ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 645-648

  Aoki, Takaaki ^a   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Gas cluster ion beam; Molecular dynamics; Silicon; Sputtering; Surface smoothing

Indexed keywords

COMPUTER SIMULATION; CRYSTAL STRUCTURE; ION BEAMS; ION BOMBARDMENT; KINETIC ENERGY; SPUTTERING;

CLUSTER CONTACTS; GAS CLUSTER ION BEAM; SURFACE BLOCK; SURFACE SMOOTHING;

MOLECULAR DYNAMICS;

EID: 33947665958     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.048     Document Type: Article

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