Batch fabrication of metal oxide sensors on micro-hotplates

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Barborini, E ^a   Vinati, S ^a   Leccardi, M ^a   Repetto, P ^a   Bertolini, G ^a   Rorato, O ^a   Lorenzelli, L ^b   Decarli, M ^b   Guarnieri, V ^b   Ducati, C ^c   Milani, P ^d  

^a Via Franco Russoli 3   (Italy)

^b FONDAZIONE BRUNO KESSLER   (Italy)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^d UNIVERSITY OF MILAN   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; MICROMACHINING; NANOSTRUCTURES; OXIDE FILMS;

BATCH FABRICATION; METAL OXIDE SENSORS; MICRO-HOTPLATES;

CHEMICAL SENSORS;

EID: 42549103624     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/055015     Document Type: Article

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