Sputtering of elemental metals by Ar cluster ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 459-463

  Matsuo, Jiro ^a   Toyoda, Noriaki ^a   Akizuki, Makoto ^a,b   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

^b SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ION BEAMS; ION BOMBARDMENT; RADIATION DAMAGE; SPUTTERING; SUBLIMATION;

CLUSTER IONS;

COPPER;

EID: 0031546202     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00541-1     Document Type: Article

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