Molecular dynamics study of damage formation characteristics by large cluster ion impacts

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 202, Issue , 2003, Pages 278-282

  Aoki, Takaaki ^a   Matsuo, Jiro ^a   Takaoka, Gikan ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster impact; Damage formation; Molecular dynamics

Indexed keywords

ARGON; ION BEAMS; SILICON; SURFACE TREATMENT; THIN FILMS;

CLUSTER IMPACT;

MOLECULAR DYNAMICS;

EID: 0037377295     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01869-4     Document Type: Conference Paper

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